H-Galden HFPE has been recently introduced and is a complement to the Galden PFPE fluids as Heat Transfer Medium. H-Galden fluids have lower Global Warming Potential and higher heat transfer efficiency than completely fluorinated fluids thanks to their linear fluorinated backbone and two hydrogen atoms at the chain ends. They are rapidly gaining acceptance as heat transfer media in front-end Semiconductor Manufacturing Tools such as Dry Etchers, Ion Implanters, Lithography Steppers, Chemical Vapor Deposition, Physical Vapor Deposition   etc. They are also used in back-end testing tools such as Probers and Automatic Testing Machines.

Similar to Galden fluids, H-Galden fluids are economic alternatives to DI-water/glycol blends as heat transfer medium – no resistivity monitoring, low maintenance costs, long mean time between failure (MTBF) and hence lower Cost of Ownership.
 
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• H-Galden ZT 130 Heat Transfer Fluid 
• H-Galden ZT 150 Heat Transfer Fluid
• H-Galden ZT 180 Heat Transfer Fluid