Halar® ECTFE is a partially fluorinated semi-crystalline polymer that offers a unique combination of purity, surface smoothness, thermal and chemical resistance. In addition to excellent mechanical properties it is also easy to process through extrusion, molding and powder coating.

Halar ECTFE is a high purity fluoropolymer with low extractables and an exceptionally smooth surface, which accounts for its extensive use in water and high purity fluid systems within the semiconductor industry. In addition to tubing, pipe and tanks, many process modules in wafer cleaning tools and wet benches use Halar as a process and as well as structural material. Halar is injection molded for high purity filter cartridges and components.

Halar plastic sheet and stock shapes meet industry clean room fire safety standards such as FM Global FM 4910. This governs the materials of construction for Fire Safe wet benches, cleaning tools and wafer process equipment. Halar Powder Coating grades meet the FM 4922/4910 requirements for clean room exhaust duct systems. Halar powder coatings are pure, smooth and seamless and have replaced PVDF sheet linings in many ultrapure water (UPW) applications.

  Solvay Solexis Halar grades for semiconductor applications:

• HALAR® 300 LC  – extrusion (tubes) and injection molding
• HALAR® 901  – extrusion (sheets, tubes)
• HALAR® 902  – extrusion (rod, shapes)

For more information on powder coating grades contact: www.solexissemiconinfo@solvay.com

Finally, ECTFE HALAR® has excellent fire safety properties, and thus complies to FM 4910 standards as well as for coating of FM 4922 ducts.

Click Here to download Halar® Fluoropolymer Coatings for Cleanroom Exhaust Duct Systems. The file size is 906 KB.