Galden PFPE fluids are widely used as heat transfer media in front-end Semiconductor Manufacturing Tools such as Dry Etchers, Ion Implanters, Lithography Steppers, Chemical Vapor Deposition, Physical Vapor Deposition etc. They are also used in back-end testing tools such as Probers and Automatic Testing Machines as well as in Reliability Testing, such as Thermal Shock, Gross Leak and Liquid Burn-in.
Galden fluids have and are successfully replacing DI-water/glycol blends as heat transfer media, thanks to their ability to provide economic solutions – no resistivity monitoring low maintenance costs, long mean time between failure (MTBF) and hence lower Cost of Ownership.
Click here to access our technical literature for Fomblin PFPE.
